EUV is the clear winner down to 5nm, but what comes after that may be a combination of tools and techniques. Chipmakers are ramping up extreme ultraviolet (EUV) lithography for advanced logic at 7nm ...
John Warlaumont, vice president of advanced technologies at SEMATECH, a consortium of the world's chip manufacturers, talks to Nadya Anscombe about the future of optical lithography. Most companies in ...
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