#3dnand #nand #channelhole #fib #sem #fibsem #electronmicroscopy #electronmicroscope | Hitachi Electron Microscope
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#ceramiccapacitor #mlcc #fib #sem #fibsem #electronmicroscopy #electronmicroscope | Hitachi Electron Microscope
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470 serial cross-sectional SEM images of a 128-layer 3D NAND flash memory were acquired on an orthogonally arranged FIB-SEM in 16 hours. The BSE images were taken at 1 kV accelerating voltage to obtain compositional contrast with minimum depth information. Reconstructed 3D data set allows extraction of arbitrary slice planes and subsequent geometrical & dimensional evaluation of channel holes. #3DNAND #FlashMemory #128Layer #FIB #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Available inst
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470 serial cross-sectional SEM images of a 128-layer 3D NAND fla…
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Serial cross sectional SEM images of a multilayer ceramic capacitor (MLCC) were acquired using FIB-SEM. A 3D image was reconstructed from 360 images showing Ni electrode, BaTiO3 dielectric and voids. After segmentation, volume ratio of Ni, BaTiO3, and void regions turned out approximately 29 %, 69 %, and 2 %, respectively. Comparing void ratio of multiple Ni electrodes, there are variations between each layer. #CeramicCapacitor #MLCC #FIB #SEM #FIBSEM #electronmicroscopy #ElectronMicroscope Avai
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